Lieber Research Group

  • Home
  • Research
    • Overview
    • Nanomaterials
    • Nano-Bioelectronics
    • Brain Science
    • Image Gallery
  • People
    • Charles M. Lieber
    • Grad Students
    • Post Docs
    • Tech & Admin Staff
    • Former Group Members
    • Group News
  • Publications
  • News
  • Resources
    • Shared Resources
    • Facilities
      • Materials Synthesis
      • Assembly and Fabrication
      • Characterization
      • Biology
    • Lab Tour
    • Research Sponsors
    • Sitemap
  • Contact

Cleanroom

The cleanroom offers ample hood space, an optical microscope, internet access and (in the rightmost hood) a spin coater.

Lithographic resists can be spun onto samples using this spin coater.

The rapid thermal annealer (RTA) is used to improve the semiconductor/metal interface in our devices.

The oxygen plasma cleaner (left) and ozone stripper (right) are used to remove organics from samples.

This BOC Edwards e-beam evaporator uses an electron beam to heat a metal source and deposit thin metal films.

This BOC Edwards thermal evaporator uses resistive heating to volatilize a metal source and deposit thin metal films.

The AB-M mask aligner has mid-UV and deep-UV exposure capabilities. The minimum feature size achievable is about 1-2 microns.

  • Shared Resources
  • Facilities
    • Materials Synthesis
    • Assembly and Fabrication
    • Characterization
    • Biology
  • Lab Tour
    • Offices
    • Characterization-1
    • Characterization-2
    • Characterization-3
    • Characterization-4
    • Synthesis-1
    • Synthesis-2
    • Synthesis-3
    • BioLab-1
    • BioLab-2
    • BioLab-3
    • Machine Shop
    • Cleanroom
    • Wetlab
    • Kitchen
    • Conference Room
  • Research Sponsors
  • Sitemap
Our Sponsors
Previous
  • Office of Naval Research

    http://www.onr.navy.mil/

  • Defense Advanced Research Projects Agency

    www.darpa.mil

  • Air Force Office of Scientific Research

    www.wpafb.af.mil

  • National Institutes of Health

    http://www.nih.gov/

  • MITRE

    http://www.mitre.org/

Next
Harvard University

Harvard University
12 Oxford Street, Cambridge, MA 02138
p: 617-496-3169 | f: 617-496-5442 | Contact Us | Login

©2022 Harvard University. Website design by Jackrabbit Design

  • Home
  • Research
  • People
  • Publications
  • News
  • Resources
  • Contact